Hangarau horoi taiahoHe tono angitu tēnei o te hangarau taiaho i roto i te ao hangarau. Ko tōna kaupapa matua he whakamahi i te kaha nui o ngā taiaho hei whakahohe i te taunekeneke i waenga i ngā hihi taiaho me ngā poke e piri ana ki ngā papa mahi. Ka wehea ngā poke mai i ngā papa mā te whakawhānui wera tere, te rewa, te whakakorikori hau me ētahi atu tikanga. Nā te mea he pai te mahi, he atawhai ki te taiao me te tiaki pūngao, kua angitu te whakamahi i te hangarau horoi taiaho ki te horoi pokepokea ai ngā potae, te tango peita tinana waka rererangi, te whakaora i ngā taonga tuku iho ahurea me ētahi atu mara.
Ko ngā hangarau horoi tuku iho ko te horoi waku miihini (te pupuhi onepu, te horoi wai pehanga teitei, me ētahi atu), te horoi waikura matū, te horoi ultrasonic, te horoi hukapapa maroke me te maha atu. He whānuitia te whakamahinga o ēnei hangarau puta noa i ngā ahumahi. Hei tauira, ka taea e te pupuhi onepu te tango i ngā ira waikura whakarewa, ngā pakaru mata me ngā paninga conformal i runga i ngā papa ara iahiko mā te whiriwhiri i ngā mea whakakoi o ngā momo pakeke. He whānuitia te whakamahinga o te horoi waikura matū mō te tango i te unahi hinu mata taputapu, te horoi unahi poiha me te wetewete i ngā paipa hinu. Ahakoa kua pakeke, he ngoikoretanga nui ngā tikanga tuku iho: he ngāwari te pakaru onepu ki ngā mata kua rongoatia, ā, ka puta te poke taiao i te horoi waikura matū, ā, ka waikura pea ngā papa mena ka kore e tika te whakahaere. Ko te putanga mai o te horoi laser he tohu i tētahi huringa nui i roto i te hangarau horoi. Mā te whakamahi i te kaha teitei o te kaha o ngā laser, te tika me te tuku pai, ka pai ake te horoi laser i ngā tikanga tuku iho i roto i te pai o te horoi, te tika me te tūnga. Ka whakakorea te poke taiao mai i te horoi matū, ā, kāore e kino ki ngā papa.
Ngā Mātāpono o te Horoi Taiaho
He aha rawa te horoi taiaho? E pā ana tēnei ki te tukanga tango rauemi mai i ngā mata totoka (he wai rānei i ētahi wā) mā te hihi taiaho. I te iti o te rere o te taiaho, ka wera te kaha taiaho e mimitihia ana i ngā rauemi, ka mimiti, ka whakangawari rānei. I te nui o te rere o te taiaho, ka huri ngā rauemi hei parāuma. Ko te horoi taiaho he tikanga whakamahi i ngā taiaho pāorooro hei tango rauemi, ahakoa ka taea e ngā hihi taiaho ngaru tonu te tango i ngā rauemi i te kaha e tika ana. Ko ngā taiaho excimer ultraviolet hōhonu, me ngā roangaru tata ki te 200 nm, e whakamahia ana mō te photoablation.
Te hohonutanga opūngao taiahoKo te mimiti me te nui o te rauemi e tangohia ana i ia pātītī ka whakawhirinaki ki ngā āhuatanga whatu o te rauemi, tae atu ki te roangaru taiaho me te roanga o te pātītī. Ko te papatipu katoa i tangohia mai i tētahi ūnga i ia pātītī ka tautuhia ko te tere whakatītī. Ko ngā āhuatanga ira taiaho pēnei i te tere matawai me te uhi raina he pānga nui ki te tukanga whakatītī.
Ngā Momo Hangarau Horoi Taiaho
1) Horoi Maroke Taiaho
Ko te horoi maroke laser he mea e uru ana ki tete whakamātao tika i te hihi laser o ngā wahi mahi. Ka mimitihia e ngā poke, e ngā papa rānei te kaha o te laser, ka piki ake te pāmahana, ka puta te whakawhanuitanga wera, te wiri wera rānei o te papa, e wehewehe ana i ngā poke mai i ngā papa. E rua ngā āhuatanga e puta ai tēnei: ka mimitihia e ngā poke mata te kaha o te laser ka whakawhanui, ka mimitihia rānei e ngā papa te kaha ka wiri wera.
I te tau 1969, i kitea e SM Bedair me ētahi atu he iti noa iho ngā herenga o ngā maimoatanga mata tuku iho (te maimoatanga wera, te waikura matū, te pupuhi onepu). I kitea e rātou ka taea e te kaha nui o ngā taiaho arotahi te mimiti i ngā rauemi mata me te kore e kino ngā papa. I whakaūhia e ngā whakamātautau ka taea e te taiaho rupi Q-switched me te kaha kaha o te 30 MW/cm² te horoi i ngā poke mai i ngā mata silicon me te kore e kino te papa, koinei te whakatinanatanga tuatahi o te horoi maroke taiaho.
Ka taea te whakaatu i te tere horoi whānui mā te tere tango i ngā para kiriata, e whakaaturia ana i raro nei:
(Tātai: ε—taupū pūngao pāorooro laser; h—taupū matotoru kiriata poke; E—taupū tauwehenga rapa kiriata)
2) Horoi Mākū Taiaho
I mua i te whakakānga i te hihi laser, ka pania he kiriata wai ki te mata o te mea mahi. Ka tere te whakamahana me te mimiti o te kiriata e te kaha laser, ka puta he ngaru ru tere tonu e wehe ana i ngā matūriki poke mai i te papa. Kāore e hiahiatia he tauhohenga matū i waenga i te papa me te kiriata wai mō tēnei tikanga, ā, ka whakawhāiti i ngā rauemi e tika ana mōna.
I te tau 1991, i aro atu a K. Imen me ētahi atu ki ngā paru iti-micron e toe ana i runga i ngā papa whakarewa me ngā konganuku i muri i te horoinga tikanga. I pania e rātou ngā papa ki te kiriata mimiti-reera, ā, i whakamātaohia ki te reera CO₂. I mimiti te pūngao e te kiriata, i whakamahanahia wawetia, i kohuatia, ā, i pāngia e te mimiti pahū, ka tangohia ngā paru mata—koinei te tikanga o te horoinga mākū reera.
3) Te Horoi Ngaru Ru Plasma Taiaho
Ka puta ngā ngaru wiri plasma reera ina whakakorikoria e ngā reera te hau hei ngaru wiri plasma porowhita i te wā e tukuna ana. Ka pā ēnei ngaru wiri ki ngā papa, ka tukuna te pūngao hei tango i ngā poke me te kore e kino te papa (kāore ngā reera e taunekeneke tika ki ngā papa). Ka horoia e tēnei hangarau ngā matūriki he iti noa iho, tae atu ki ngā tekau nanometa, ā, kāore he herenga mō te roangaru reera.
Ko ngā mātāpono ā-tinana o te horoinga plasma e whakarāpopototia ana penei:
a) Ka mimitia ngā hihi taiaho e te paparanga poke i runga i te mata ūnga.
b) Ka hangaia e te mimiti kaha nui te parāoa toto e tere horapa ana (he hau kore pumau kua tino katotehia), ka puta ai ngā ngaru ru.
c) Ka pakaru, ka tangohia hoki ngā poke e ngā ngaru ru.
d) Me poto rawa ngā pāorooro taiaho kia kore ai e kohia te wera e kino ai te papa.
e) E whakaatu ana ngā whakamātautau i te hanganga o te parāoa ki runga i ngā mata whakarewa ina kitea ngā waikura.
Ka puta noa te whakaputanga parāma i runga ake i te paepae kiato pūngao, e whakawhirinaki ana ki te paru poke, ki te paparanga waikura rānei ka tangohia. Kei reira tētahi atu paepae teitei ake, kei tua atu i tēnā ka pakaru te papa. Hei whakarite i te horoinga whai hua me te kore e kino te papa, me whakarite ngā tawhā taiaho kia mau tonu te kiato pūngao pāorooro i waenga i ngā paepae e rua.
I te tau 2001, i whakamahia e JM Lee me ētahi atu ngā ngaru ru plasma mai i ngā taiaho arotahi-teitei. I whakakāhia ngā papa silicon e te taiaho pāorooro me te kiato pūngao o te 2.0 J/cm² (he nui ake i te paepae kino o te silicon) i te taha whakarara, ā, i angitu te tango i ngā matūriki tungsten 1 μm. Ko te tikanga, ko te horoinga ngaru ru plasma taiaho he wāhanga iti o te horoi maroke.
I te tīmatanga i whakawhanakehia hei tango i ngā matūriki moroiti mai i ngā papa haurua-irahiko, kua whānuitia ēnei hangarau horoi taiaho e toru ki te horoi i te pokepokea ai ngā potae, te tango peita kiri rererangi, te whakaora i ngā taonga tuku iho ahurea me te maha atu. Ka taea te pupuhi i te hau kore mahi ki runga i ngā papa i te wā e whakamahia ana te taiaho hei tango tonu i ngā poke kua wehea, hei ārai i te poke anō me te waikura.
Ngā Whakamahinga o te Hangarau Horoi Taiaho
1) Ahumahi Ārahi-ārahi: Te horoi i ngā Wafer Ārahi-ārahi me ngā Papa Whatu
Ka rite tonu ngā mahi tukatuka o ngā papa whakarewa hiko me ngā papa whatu (te tapahi, te huri) hei hanga i ngā āhua e hiahiatia ana, ka puta mai ngā paru matūriki he uaua ki te tango, ā, he ngāwari ki te paru anō. Ka whakaitihia e ngā paru kei runga i ngā papa whatu te kounga o te tānga ara iahiko, ka whakapotohia hoki te roa o te ora o ngā maramara. I runga i ngā papa whatu, ka whakaitihia te mahi a te taputapu whatu me te paninga, ka puta he tohatoha pūngao kāore i te ōrite, ka whakaitihia hoki te roa o te ora mahi.
Kāore i te maha ngā whakamahinga o te horoi maroke taiaho ki konei nā te mea he tūponotanga kino ki te papa, engari he maha ngā whakamahinga angitu o te horoi mākū me te horoi ngaru ru plasma. I whakatakotoria e Xu Chuanyi me ētahi atu te peita aukume tauine-micron hei kiriata dielectric ki runga i ngā papa whatu tino maeneene, ā, i tutuki ai te horoi taiaho pulsed whai hua. Ahakoa i piki ake ngā matūriki poke katoa, i tino heke te rahi me te kapi. I ako a Zhang Ping i ngā pānga o te tawhiti mahi me te kaha taiaho ki te whai huatanga horoi mō ngā matūriki o ngā rahi rerekē. I whakaatuhia e ngā whakamātautau he taiaho 240 mJ i tutuki ai te horoinga pai o ngā matūriki polystyrene ki runga i te karāhe kawe i te tawhiti mahi 1.90 mm. I pai ake te whai huatanga horoi me te kaha taiaho teitei ake, ā, he māmā ake te tango i ngā matūriki nui ake.
2) Ahumahi Whakarewa: Te Horoi Mata Whakarewa
Ko te horoi mata whakarewa e aro ana ki ngā poke nui: ngā paparanga waikura/waikura, te peita, ngā paninga me ētahi atu tāpiringa, e whakarōpūtia ana hei poke rauropi (peita, paninga) me ngā poke kore-rauropi (waikura). Ka tutuki i te horoinga ngā whakaritenga tukatuka/whakamahinga e whai ake nei: hei tauira, te tango i ngā paparanga waikura 10 μm te matotoru mai i ngā koranu titanium i mua i te whakarewa, te tango i te peita mai i ngā kiri rererangi hei peita anō, me te horoi i ngā toenga rapa mai i ngā pokepokea ai ngā potae hei whakarite i te kounga o te hua me te roa o te ora o te pokepokea ai.
He teitei ake ngā paepae kino o ngā konganuku i ō rātou paepae horoi poke, e āhei ai te horoi whai hua me ngā taiaho hiko tika. Ko ētahi o ngā tono kua pakeke: I whakaatu a Wang Lihua me ētahi atu i tangohia e te taiaho 5.1 J/cm² ngā paparanga waikura mai i te koranu konumohe A5083-111H me te pupuri i te kounga o te papa, ā, i horoia pai e te taiaho pulsed 100 W ngā paparanga waikura koranu titanium me te whakanui ake i te pakeke o te mata. He maha ngā kaihanga o te whare (Raycus Laser, Han's Laser, Shenzhen Chuangxin) e tuku ana i ngā taputapu horoi taiaho mō ngā pokepoke rapa, te waikura konganuku me te tango hinu wāhanga.
3) Te Tiaki i ngā Taonga Tuku Iho: Te Horoi i ngā Taonga Tuku Iho me ngā Taonga Pepa
Ka kohia e ngā taonga tuku iho o te whakarewa me te kōhatu te paru, ngā paru waituhi me ētahi atu poke i roto i ngā taonga tuku iho, ā, me tango atu kia whakahokia mai ai tōna āhua taketake. Ka puta he pokepokea ai, he papa rānei i ngā taonga pepa (ngā peita, ngā tuhituhi whakairo) i te wā e penapenahia ana, ā, ka tino pā kino ki tōna āhua me tōna uara ahurea/hītori.
I whakamanahia e Zhao Ying me ētahi atu te horoinga laser UV o ngā papa pokepokea i runga i te pepa raihi: kotahi te matawai i te 3.2 J/mm² i tangohia ai ngā papa angiangi, ā, e rua ngā matawai i taea ai te tango katoa; i pakaru te pepa i te kaha laser nui rawa. I angitu a Zhang Xiaotong ki te whakaora i tētahi taonga parahi koura mā te whakamahi i te tikanga laser mākū. I whakamahia e Zhang Licheng te horoi laser ki tētahi whakapakoko uku wahine peita mai i te Han Dynasty. I arotakehia e Yuan Xiaodong me ētahi atu te whai huatanga o te horoi laser mō ngā toenga kōhatu, me te whakataurite i te kino o te papa me te whai huatanga o te tango i ngā paru waituhi, paowa me te peita i runga i te onepū.
Whakamutunga
He hangarau matatau te horoi taiaho me ngā tirohanga whānui ki ngā rangahau me ngā tono i roto i te rererangi, ngā taputapu hōia, ngā hikohiko me ētahi atu mara tino tika. Kua pakari i roto i ngā ahumahi maha nā tōna whai huatanga, tōna atawhai ki te taiao me ngā hua horoi pai rawa atu, kei te whānui haere tonu ōna tono. Haunga te tango peita me te waikura kua whakapumautia, ko ngā whanaketanga hou ko te horoi taiaho o ngā paparanga waikura i runga i ngā waea whakarewa. Ko te whanaketanga ā muri ake nei e whakawhirinaki ana ki te whakawhānui ake i ngā tono o nāianei, te whakauru atu ki ngā mara hou me te auaha i ngā taputapu:
- Whakakaha ake i te rangahau ariā hei ārahi i ngā tono mahi. Ko ngā rangahau o nāianei e whakawhirinaki nui ana ki ngā whakamātautau, kāore he anga ariā pakari. He mea nui te whakatū i tētahi anga pēnei mō te pakari o te hangarau.
- Whakawhanui ake i ngā tono ki ngā mara o nāianei me ngā mara hou. Kua pakari mō te tango peita/waikura, ko ngā whakamahinga hou ko te horoi i te waikura waea whakarewa, hei whakarato i te whenua momona mō te tipu.
- Whakawhanakehia ngā taputapu horoi taiaho hou, ka wehea ki ngā taputapu maha-kaupapa (hei tauira, te tango peita/waikura whakakotahi) me ngā taputapu motuhake (hei tauira, ngā taputapu/muka ritenga mō ngā wāhi kuiti). He huarahi whai hua te aunoatanga katoa mā te whakauru atu ki ngā karetao ahumahi.
Wā tuku: Mei-14-2026
