Te kaupapa, ngā momo me ngā tono ohoroi laserhangarau
He whakamahinga angitu te hangarau horoi taiaho i roto i te ao hangarau. Ko tōna kaupapa matua he whakamahi i te kaha nui o te taiaho hei taunekeneke me ngā poke e piri ana ki te papa o te mea mahi, ka wehea ai rātou mai i te papa i roto i te ahua o te whakawhānui wera tere, te rewa, me te mimiti hau. Ko te hangarau horoi taiaho e tohuhia ana e te tino whai hua, te atawhai taiao, me te tiaki pūngao. Kua angitu te whakamahinga i roto i ngā mara penei i te horoi pokepokea ai ngā potae, te tango peita tinana waka rererangi, me te whakaora i ngā taonga tuku iho.
Ko ngā hangarau horoi tuku iho kote horoi waku ā-mīhini(te horoi kirikiri, te horoi wai pēhanga teitei, me ētahi atu), te horoi waikura matū, te horoi ultrasonic, te horoi hukapapa maroke, me ētahi atu. Kua whānuitia te whakamahinga o ēnei hangarau horoi i roto i ngā ahumahi maha. Hei tauira, ka taea e te horoi kirikiri te tango i ngā ira waikura whakarewa, ngā pūwero mata whakarewa, me te wanihi ārai-toru i runga i ngā papa hiko mā te whiriwhiri i ngā mea whakakoi o ngā pakeke rerekē. He whānuitia te whakamahinga o te hangarau horoi waikura matū ki te horoi i ngā paru hinu i runga i ngā mata taputapu, te unahi i roto i ngā kohua, me ngā paipa hinu. Ahakoa kua pai te whanaketanga o ēnei hangarau horoi, kei a rātou tonu ētahi raruraru. Hei tauira, ka taea e te horoi kirikiri te whakakino ngāwari i te mata kua rongoatia, ā, ka taea e te horoi waikura matū te whakakino i te taiao me te waikura o te mata kua horoia mena kāore i te tika te whakahaere. Ko te putanga mai o te hangarau horoi laser he huringa nui i roto i te hangarau horoi. Ka whakamahia e ia te kaha teitei o te kaha, te tino tika, me te tuku pai o te kaha laser, ā, he mārama ngā painga ki ngā hangarau horoi tuku iho e pā ana ki te pai o te horoi, te tika o te horoi, me te wāhi horoi. Ka taea e ia te karo i te parahanga taiao i puta mai i te horoi waikura matū me ētahi atu hangarau horoi, ā, e kore e whakakino i te papa.
He aha te horoi taiaho? Ko te horoi taiaho he tukanga e whakamahia ai te hihi taiaho hei tango i te rauemi mai i te mata o te totoka (i ētahi wā he wai). I te iti o te rere taiaho, ka whakamahanahia te rauemi e te kaha taiaho e mimitihia ana, ka mimiti, ka whakangawari rānei. I te nui o te rere taiaho, ka huri te rauemi hei parāuma. I te nuinga o te wā, ko te horoi taiaho e pā ana ki te tango rauemi mā te whakamahi i ngā taiaho pāorooro, engari ki te nui te kaha o te taiaho, ka taea te whakamahi i te hihi taiaho ngaru tonu hei tango i te rauemi. Ko te taiaho excimer o te mārama ultraviolet hohonu e whakamahia ana mō te tangohanga whatu. Ko te roanga ngaru taiaho e whakamahia ana mō te tangohanga whatu he tata ki te 200nm. Ko te hohonu o te mimiti o te kaha taiaho me te nui o te rauemi e tangohia ana e te tangohanga taiaho kotahi e whakawhirinaki ana ki ngā āhuatanga whatu o te rauemi, tae atu ki te roanga ngaru taiaho me te roa o te tangohanga. Ko te papatipu katoa i tangohia mai i te ūnga e ia tangohanga taiaho ka kiia ko te tere tangohanga. Ko te tere matawai o te hihi taiaho me te kapinga o te raina matawai, me ētahi atu, ka pā nui ki te tukanga tangohanga.
Ngā Momo Hangarau Horoi Taiaho
1) Te horoi maroke i te rēseri: Ko te horoi maroke i te rēseri e pā ana ki te whakamahana tika o te mea horoi e te rēseri pāorooro, ka mimiti te pūngao o te turanga, o te mata rānei, ka piki ake te pāmahana, ka hua ake te whānui wera, te wiri wera rānei o te turanga, ā, ka wehea ngā mea e rua. Ka taea te wehewehe i tēnei tikanga ki ngā āhuatanga e rua: ko tētahi ko te mimiti o ngā paru mata i te pūngao rēseri ka whānui; ko tētahi ko te mimiti o te turanga i te pūngao rēseri ka whakaputa wiri wera. I te tau 1969, i kitea e SM Bedair me ētahi atu he rerekē ngā ngoikoretanga o ngā tikanga maimoatanga mata pērā i te maimoatanga wera, te waikura matū, me te horoi onepu. I taua wā anō, ko te nui o te pūngao i muri i te arotahi rēseri ka taea te whakapūmau i te mata o te rauemi, ka taea ai te horoi kore-whakangaro o te mata o te rauemi. I roto i ngā whakamātautau, i kitea mā te whakamahi i te rēseri whakawhiti-Q rupi me te kaha o te 30 MW/cm2 ka taea te horoi i ngā paru mata o te rauemi silicon me te kore e kino te turanga, ā, mō te wā tuatahi, i kitea te horoi maroke rēseri o ngā paru mata o te rauemi. Ka taea te whakaatu i te tere whānui mā te tere o te wehenga o ngā kongakonga paparanga kiriata, penei:
I roto i te tātai, ko ε te tohu o te taupū pūngao pāorooro taiaho, ko h te tohu o te taupū matotoru o te paparanga kiriata poke, ā, ko E te tohu o te taupū modulus rapa o te paparanga kiriata.
2) Te Horoi Mākū Reera: I mua i te whakaaturanga o te mea mahi hei horoi ki te reera pāorooro, ka pania he kiriata wai paninga-mua o te mata. I raro i te mahi a te reera, ka tere te piki o te pāmahana o te kiriata wai, ka mimiti. I te wā o te mimiti, ka puta he ngaru pānga, ka pā ki ngā matūriki poke, ka wehe atu i te papa. Ko tēnei tikanga me kaua te papa me te kiriata wai e tauhohe tetahi ki tetahi, ā, ka whakawhāiti i te whānuitanga o ngā rauemi e tika ana. I te tau 1991, i aro atu a K. Imen me ētahi atu ki te raruraru o ngā poke matūriki iti-micron e toe ana i runga i ngā mata o ngā papa semiconductor me ngā rauemi whakarewa i muri i te whakamahinga o ngā tikanga horoi tuku iho, ā, i ako i te tono o te paninga i tētahi kiriata ki runga i te mata o te papa rauemi ka taea te mimiti pai i te kaha reera. I muri mai, mā te whakamahi i te reera CO2, ka mimiti te kiriata i te kaha reera, ā, ka tere te piki o te pāmahana, ka kohuatia, ka puta he mimiti pahū, ka tangohia ngā poke mai i te mata o te papa. Ka kiia tēnei tikanga horoi ko te horoi mākū reera.
3) Te Horoi Ngaru Ru Plasma Reo: Ka puta ngā ngaru ru plasma reo ina whiti te reo ki te rangi, ā, ka puta he ngaru ru plasma porowhita. Ka mahi te ngaru ru ki te mata o te mea mahi hei horoi, ā, ka tukuna te kaha hei tango i ngā poke. Kāore te reo e mahi ki te papa, nō reira kāore e kino te papa. Ka taea e te hangarau horoi ngaru ru plasma reo te horoi i ngā matūriki he maha ngā tekau nanometer te whānui, ā, kāore he here i runga i te roangaru laser. Ka taea te whakarāpopoto i te kaupapa ā-tinana o te horoi plasma penei: a) Ka mimitihia te hihi laser e tukuna ana e te reo e te paparanga poke i runga i te mata kua rongoatia. b) Ka hangaia e te nui o te mimiti he plasma tere te hora (he hau kore pumau kua tino ionized) ā, ka puta he ngaru pānga. c) Ka meinga e te ngaru pānga kia pakaru ngā poke, kia tangohia. d) Me poto te whānui o te pā o te pā marama kia kore ai e kohia te mata kua rongoatia. e) Kua whakaatuhia e ngā whakamātautau ina he waikura kei runga i te mata whakarewa, ka puta he plasma ki runga i te mata whakarewa. Ka puta noa te parāma ina nui ake te kaha o te pūngao i te paepae, e whakawhirinaki ana ki te paparanga poke kua tangohia, ki te paparanga waikura rānei. He mea tino nui tēnei pānga paepae mō te horoinga whai hua me te whakarite i te haumaru o te rauemi papa. He paepae tuarua anō hoki te āhua o te parāma. Mena ka nui ake te kaha o te pūngao i tēnei paepae, ka pakaru te rauemi papa. Hei mahi horoinga whai hua me te whakarite i te haumaru o te rauemi papa, me whakarite ngā tawhā taiaho kia rite ki te āhuatanga kia tino noho te kaha o te pūngao o te pao mārama i waenganui i ngā paepae e rua. I te tau 2001, i whakamahia e JM Lee me ētahi atu te āhuatanga e whakaputa ana ngā taiaho mana-nui i ngā ngaru ru parāma ina arotahihia, ā, i whakamahia he taiaho pao me te kaha o te kaha o te 2.0 J/cm2 (he nui ake i te paepae kino o ngā papa silicon) hei whakahāngai i te taha o te papa silicon, me te horoi angitu i ngā matūriki tungsten 1 μm e piri ana ki te mata o te papa silicon. Ka kiia tēnei tikanga horoi ko te horoinga ngaru ru parāma taiaho, ā, ko te horoinga ngaru ru parāma taiaho he momo horoinga taiaho maroke. Ko te kaupapa taketake o ēnei hangarau horoi taiaho e toru he horoi i ngā matūriki ririki i runga i te mata o ngā papa haurua-irahiko. Ka taea te kī i puta mai te hangarau horoi taiaho me te whanaketanga o te hangarau haurua-irahiko. Heoi, kua whakamahia tonutia te hangarau horoi taiaho ki ētahi atu mara, pērā i te horoi pokepokea ai ngā potae, te tango peita kiri rererangi, me te whakaora i te mata o ngā taonga tawhito. I raro i te hihi taiaho, ka taea te pupuhi i te hau kore mahi ki runga i te mata o te papa. Ina tangohia ngā poke mai i te mata, ka pupuhi tonu atu i te mata e te hau hei karo i te parahanga anō me te waikura o te mata.
Tete whakamahinga o te hangarau horoi laser
1) I roto i te mara o te hangarau haurua-ira, ko te horoi i ngā papa haurua-ira me ngā papa whatu he rite tonu te tukanga, arā, ko te tukatuka i ngā rauemi mata ki ngā āhua e hiahiatia ana mā te tapahi, te huri, me ētahi atu. I roto i tēnei tukanga, ka uru mai ngā paru matūriki, he uaua ki te tango, ā, ka puta he raruraru paru nui. Ka pāngia e ngā paru i runga i te mata o ngā papa haurua-ira te kounga o te tānga papa ara iahiko, ā, ka whakapotohia te roa o te ora o ngā maramara haurua-ira. Ka pāngia e ngā paru i runga i te mata o ngā papa whatu te kounga o ngā taputapu whatu me ngā paninga, ā, ka arahi pea ki te tohatoha pūngao kore taurite, ka whakapotohia te roa o te ora. Nā te mea he ngāwari te horoi maroke laser ki te whakararu i te mata o te papa, he iti ake te whakamahinga o tēnei tikanga horoi i roto i te horoi i ngā papa haurua-ira me ngā papa whatu. He angitu ake ngā tono o te horoi mākū laser me te horoi ngaru ru plasma laser i roto i tēnei mara. I ako a Xu Chuanyi me ētahi atu i te whakatakotoranga o te peita aukume motuhake moroiti ki runga i te mata o ngā papa whatu tino maeneene hei kiriata dielectric, kātahi ka whakamahia he laser pulsed mō te horoi. He pai te hua o te horoi, ahakoa i piki ake te maha o ngā matūriki poke i ia wāhi, i tino heke te rahi me te horahanga hipoki o ngā matūriki poke. Ka taea e tēnei tikanga te horoi pai i ngā matūriki poke iti-rahi i runga i te mata o ngā papa whatu tino maeneene. I ako a Zhang Ping i te awe o te tawhiti mahi me te kaha laser ki te hua horoi o ngā poke rahi matūriki rerekē i roto i te hangarau horoi plasma laser. I whakaatuhia e ngā hua whakamātautau mō ngā matūriki polystyrene i runga i ngā papa karāhe kawe, ko te tawhiti mahi tino pai mō te kaha o te 240 mJ he 1.90 mm. I te pikinga ake o te kaha laser, i tino pai ake te hua horoi, ā, he māmā ake te horoi i ngā poke matūriki nui.
2) I roto i te mara rauemi whakarewa, he rerekē te horoinga o ngā mata rauemi whakarewa i te horoinga o ngā papa haurua-ira me ngā papa whatu. Ko ngā poke hei horoi kei roto i te kāwai makoro. Ko ngā poke i runga i te mata o ngā rauemi whakarewa ko te nuinga o te paparanga waikura (paparanga waikura), te paparanga peita, te paninga, me ētahi atu tāpiringa, ā, ka taea te whakarōpū ki ngā poke rauropi (pēnei i te paparanga peita, paninga) me ngā poke kore-rauropi (pēnei i te paparanga waikura). Ko te horoinga o ngā poke mata rauemi whakarewa ko te nuinga hei whakatutuki i ngā whakaritenga o te tukatuka, te whakamahinga rānei i muri mai, pēnei i te tango i te 10 μm o te paparanga waikura mai i te mata o ngā wāhanga koranu titanium i mua i te whakarewa, te tango i te paninga peita taketake i runga i te mata kiri i te wā o ngā whakatikatika nui o te waka rererangi hei whakahaere i te rehu anō, me te horoi auau i ngā matūriki rapa e piri ana ki te pokepokea ai te potae rapa hei whakarite i te ma o te mata me te kounga me te roa o te ora o te pokepokea ai. Ko te paepae kino o ngā rauemi whakarewa he teitei ake i te paepae horoi laser o ō rātou poke mata. Mā te whiriwhiri i te laser mana tika, ka taea te whakatutuki i te pānga horoi pai ake. Kua tino whakamahia tēnei hangarau i roto i ētahi mara. Wang Lihua et al. I rangahauhia te whakamahinga o te hangarau horoi taiaho hei rongoā i ngā kiri waikura i runga i ngā mata o ngā koranu konumohe me ngā koranu titanium. I whakaatuhia e ngā hua rangahau mā te whakamahi i te taiaho me te mātotoru pūngao o te 5.1 J/cm2 ka taea te horoi i te paparanga waikura i runga i te mata o te koranu konumohe A5083-111H me te pupuri tonu i te kounga pai o te papa, ā, mā te whakamahi i te taiaho pāorooro me te mana toharite o te 100 W i roto i te tikanga matawai ka taea te horoi pai i te paparanga waikura i runga i te mata o ngā koranu titanium me te whakapai ake i te pakeke o te mata o te rauemi. Kua whakawhanakehia e ngā kamupene ā-rohe pērā i a Ruike Laser, Daqu Laser, me Shenzhen Chuangxin ngā taputapu horoi taiaho kua whakamahia whānuitia hei horoi i ngā pokepoke rapa pērā i ngā potae, ngā paparanga waikura whakarewa, me ngā paru hinu i runga i te mata o ngā wāhanga.
3) I roto i te ao o ngā taonga tuku iho ahurea, me horoi ngā taonga tuku iho whakarewa me te kōhatu me ngā mata pepa hei tango i ngā poke pērā i te paru me ngā paru waituhi e puta ana i runga i ō rātou mata nā te roa o te wā. Me tango ēnei poke hei whakaora i ngā taonga tuku iho. Mō ngā mahi pepa pērā i te tuhituhi me ngā peita, ina kore e tika te penapena, ka tupu te pokepokea ai ki runga i ō rātou mata, ka puta he ira. Ka pā kino ēnei ira ki te āhua taketake o te pepa, inā koa mō ngā pepa he nui te uara ahurea, hītori rānei, ka pā ki tōna maioha me tōna tiakitanga. I ako a Zhao Ying me ētahi atu i te whaihua o te whakamahi i te taiaho ultraviolet hei horoi i ngā ira pokepokea ai i runga i ngā panuku pepa. I whakaatuhia e ngā hua whakamātautau ko te whakamahi i te taiaho he 3.2 J/mm2 te kaha o te matawai kotahi ka taea te tango i ngā ira angiangi, ā, ko te matawai rua ka taea te tango katoa i ngā ira. Heoi, ki te nui rawa te kaha o te taiaho e whakamahia ana, ka kino te panuku pepa i te wā e tango ana i ngā ira. I angitu a Zhang Xiaotong me ētahi atu ki te whakaora i tētahi taonga tuku iho parahi koura mā te whakamahi i te tikanga kiriata wai whakamārama poutū taiaho. Zhang Licheng me ētahi atu I whakamahia e Yuan Xiaodong me ētahi atu te hangarau horoi taiaho hei whakaora i tētahi whakapakoko uku wahine i peitahia e te Han Dynasty. I ako a Yuan Xiaodong me ētahi atu i te pānga o te hangarau horoi taiaho ki te horoi i ngā toenga kōhatu, ā, i whakaritea te kino ki te tinana onepū i mua me muri i te horoinga, tae atu ki ngā pānga horoi o ngā paru waituhi, te parahanga paoa, me te parahanga peita.
Whakatau: He tikanga matatau te hangarau horoi taiaho, he whānui ngā rangahau me ngā tirohanga tono i roto i ngā mara tino tika pēnei i te rererangi, ngā taputapu hōia, me te miihini hiko me te miihini hiko. I tēnei wā, kua angitu te whakamahi i te hangarau horoi taiaho i roto i ētahi wāhi, nā te pai o te mahi horoi, te taiao, me te tino pai. Kei te whānui haere ngā wāhi tono. Kāore i te whakamahia noa te whanaketanga o te hangarau horoi taiaho i roto i ngā wāhi pēnei i te tango peita me te tango waikura, engari kua puta hoki ngā pūrongo mō te whakamahi i te taiaho hei horoi i te paparanga waikura i runga i ngā waea whakarewa i ngā tau tata nei. Ko te whānui o ngā mara tono o nāianei me te whanaketanga o ngā mara hou te pūtake o te whanaketanga o te hangarau horoi taiaho. Ko te rangahau me te whanaketanga o ngā taputapu horoi taiaho hou me te whanaketanga o ngā taputapu horoi taiaho hou ka whakaatu i te rerekētanga, ka hua ake he maha ngā mahi. I te heke mai, ka taea hoki te whakatutuki i te horoi taiaho aunoa katoa mā te mahi tahi me ngā karetao ahumahi. Ko te ia whanaketanga o te hangarau horoi taiaho penei:
(1) Te whakapakari i te rangahau mō te ariā horoi taiaho hei ārahi i te whakamahinga o te hangarau horoi taiaho. Whai muri i te arotake i te maha o ngā tuhinga, kua kitea kāore he pūnaha ariā pakari e tautoko ana i te hangarau horoi taiaho, ā, ko te nuinga o ngā rangahau he mea hangai ki ngā whakamātautau. Ko te whakatū i tētahi pūnaha ariā horoi taiaho te tūāpapa mō te whanaketanga me te pakeketanga o te hangarau horoi taiaho.
(2) Te whakawhānui ake i ngā mara tono o nāianei me ngā mara tono hou. Kua angitu te whakamahi i te hangarau horoi taiaho i roto i ngā wāhi pēnei i te tango peita me te tango waikura, ā, kua puta ngā pūrongo mō te whakamahi taiaho hei horoi i te paparanga waikura i runga i ngā waea whakarewa i ngā tau tata nei. Ko te whakawhānui ake i ngā mara tono o nāianei me te whanaketanga o ngā mara hou he oneone momona mō te whanaketanga o te hangarau horoi taiaho.
(3) Te rangahau me te whakawhanake i ngā taputapu horoi taiaho hou. Mā te whakawhanaketanga o ngā taputapu horoi taiaho hou ka kitea te rerekētanga. Ko tētahi momo he taputapu e whai mana whānui ana e kapi ana i ngā mara tono maha, pērā i te taputapu kotahi ka taea te whakatutuki i ngā mahi tango peita me te tango waikura i te wā kotahi. Ko tētahi atu momo he taputapu motuhake mō ngā hiahia motuhake, pērā i te hoahoa i ngā taputapu motuhake, i ngā muka whatu rānei hei whakatutuki i te mahi horoi i ngā poke i ngā wāhi iti. Mā te mahi tahi me ngā karetao ahumahi, he huarahi tono rongonui hoki te horoi taiaho aunoa katoa.
Wā tuku: Hurae-17-2025
